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Model: Lith-HZ-JS04- High-Vacuum Dual-Target Sputtering Coater
Technical Parameters
|
Category |
Specification |
|
Model |
Lith-HZ-JS04 |
|
Vacuum System |
Oil-free diaphragm pump + molecular pump |
|
Ultimate Vacuum |
≤1.0×10⁻⁴ Pa |
|
Pressure Measurement |
Full-range cold cathode gauge + front-end Pirani gauge |
|
Gas Control |
MFC (Mass Flow Controller) for Ar/O₂/N₂ |
|
Target Configuration |
Dual targets (independent control, alternate/synchronous sputtering) |
|
Target Compatibility |
Metals, alloys, compounds (custom sizes available) |
|
Optional Feature |
Real-time thickness monitoring (nanometer precision) |
|
Cooling System |
Energy-efficient target cooling |
|
Safety Protections |
Overpressure/overcurrent/overheat protection, vacuum interlock, emergency vent |
1. Dual-Target Flexibility
·Enables (e.g., bilayers, graded films, or interfaces) in a single run.
2. High-Vacuum Precision
·Ultra-low base pressure (≤1.0×10⁻⁴ Pa) minimizes contamination for high-purity films.
3. Intelligent Process Control
·MFC-regulated gas flow ensures repeatable reactive sputtering (e.g., oxides/nitrides).
4. User-Optimized Design
·Energy-saving pumps and cooling reduce operational costs without compromising performance.
· Semiconductors: Electrode/metallization layers, barrier films.
· Optics: Anti-reflective, conductive, or hard coatings.
· Energy: Thin-film batteries, solar cell layers.
· Research: Nanomaterials, heterostructures, surface engineering.
· Lab to Production: Scalable for both R&D prototyping and industrial batch processing.
· Safety & Reliability: Automated safeguards protect equipment and users.
· Customizable: Adaptable to diverse materials and film architectures.
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity
Pneumatic Double Point Spot Welding Machine Power Supply 220-240V, Single Phase 50/60Hz Max. Power 1···
Contact: Lily You
Phone: +86 18650702009
Tel: +86 18650702009
Email: saleskatbattery@gmail.com
Add: No. 988 Xiahe Road, Siming District, Xiamen City
919121614
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