HOME >> PRODUCTS >> Magnetron Sputtering Coating System
Glovebox-Compatible for Beam-Sensitive Materials
1. System Overview
✔ Non-conductive sample coating (Au/Ag/Pt) for SEM imaging
✔ Temperature-sensitive substrates (<60°C process temp)
✔ High-quality thin film deposition with minimized thermal damage
2. Core parameter
|
Parameter |
Specification |
|
Ultimate Vacuum |
4×10⁻² mbar |
|
Base Vacuum |
1 Pa |
|
Pump Down Time |
<1 minute |
|
Vacuum Pump |
Rotary Vane (2 L/s, Oil-lubricated) |
|
Vacuum Measurement |
Mechanical Gauge (Atmosphere-10⁻² mbar) |
4. Glovebox-Adaptable: Optional configuration for inert atmosphere processing
|
Parameter |
Specification |
|
Model |
Lith-BY-JS08 |
|
Sputtering Type |
DC Magnetron (Physical Vapor Deposition) |
|
Target Materials (Standard) |
Au (50mmØ×0.1mm) |
|
Optional Target Materials |
Ag, Pt, Cr |
|
Maximum Substrate Size |
Ø70mm (customizable) |
|
Chamber Material |
Borosilicate Glass (160mmØ×120mmH) |
|
System Dimensions (W×D×H) |
300×360×380 mm |
|
Weight |
28 kg |
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity
Contact: Lily You
Phone: +86 18650702009
Tel: +86 18650702009
Email: saleskatbattery@gmail.com
Add: No. 988 Xiahe Road, Siming District, Xiamen City
919121614
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