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Model: Lith-PC-JS06-RF&DC&MF for Conductive Multilayer Films
|
No. |
Parameter |
Specification |
|
1 |
Sputtering Chamber Ultimate Vacuum |
≤6.6×10⁻⁶ Pa |
|
2 |
System Leak Rate |
≤5.0×10⁻⁷ Pa·L/S |
|
3 |
Pump-Down Time (from atmosphere) |
≤30 min to 6.6×10⁻⁴ Pa |
|
4 |
Vacuum Retention (12h after shutdown) |
≤5 Pa |
|
5 |
Sputtering Chamber Dimensions |
≥Ø300 mm × 300 mm |
|
6 |
Magnetron Sputtering Targets |
2 × 50 mm (RF/DC/MF compatible, adjustable) |
|
7 |
Power Supplies |
1 × 500W DC, 1 × 500W RF (auto-matching) |
|
8 |
Film Uniformity |
≤5% |
|
9 |
Substrate Holder Rotation |
0–30 RPM (adjustable) |
|
10 |
Substrate Heating Range |
RT–600°C (PID-controlled) |
|
11 |
Gas Control |
100 SCCM MFC, CF16/DN16 valves |
|
12 |
Turbo Molecular Pump Speed |
300 L/s |
|
13 |
Mechanical Pump Speed |
4 L/s |
|
14 |
Vacuum Measurement |
INFICON gauge |
|
15 |
Control System |
PLC + Industrial PC + Touchscreen (full automation) |
1. Dual-Target Flexibility
·Supports (e.g., conductive/insulating stacks).
·RF/DC/MF compatibility enables processing of magnetic materials.
2. High Vacuum Performance
·Ultra-low base pressure (≤6.6×10⁻⁶ Pa) minimizes contamination for high-purity films.
·Fast pump-down and excellent vacuum retention reduce downtime.
3. Precision Process Control
·PID-controlled heating (RT–600°C) for annealing or stress management.
·Automated gas flow (MFC) and power adjustment for reproducible results.
4. User-Centric Design
·Rotating substrate holder ensures uniform coating (≤5% non-uniformity).
·Touchscreen + PLC automation simplifies operation and reduces human error.
5. Compact & Mobile
·Lockable wheeled frame suits lab environments with space constraints.
Ideal For:
· Research: Thin-film studies (semiconductors, optics, tribology).
· Industry: Functional coatings (wear-resistant, decorative, or barrier films).
· Magnetic Materials: Sputtering of Fe, Co, Ni alloys or oxides.
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity
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Contact: Lily You
Phone: +86 18650702009
Tel: +86 18650702009
Email: saleskatbattery@gmail.com
Add: No. 988 Xiahe Road, Siming District, Xiamen City
919121614
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