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Model: Lith-PC-JS08-Dual-Target, Multilayer Films Deposition
Designed for nano-scale single/multilayer functional films (hard coatings, metals, semiconductors, dielectrics). Features pre-sputtering cleaning for enhanced adhesion.
· Vacuum chamber, dual magnetron targets, heating stage, DC/RF power supplies, gas delivery, vacuum pumps, control system.
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Category |
Specification |
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Chamber Structure |
Vertical front-loading; stainless steel/vacuum materials |
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Base Pressure |
≤5×10−5 Pa |
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Leak Rate |
≤5×10−7 Pa·L/s |
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Pressure Rise Rate |
≤10 Pa (after 12 hours, pump off) |
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Pumping System |
Domestic molecular pump + mechanical pump |
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Targets |
2× 4-inch HV (1 standard-field, 1 strong-field); DC/RF compatible (Kurt J. Lesker) |
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Target-Sample Distance |
40–120 mm (multilayer); 80–120 mm (with ion source) |
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Power Supplies |
RF: 1000 W, 13.56 MHz (auto-matching); DC: 1000 W (AE brand) |
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Sample Stage |
3 substrates; 5–30 RPM rotation; 450°C heating; 1000 V bias |
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Film Thickness |
Cu/Al: 4–5 μm; Ni/PTFE: 1–2 μm (±5% uniformity over 2-inch area) |
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Adhesion Test |
Passes 3-tape peel (glass/Si/ceramic) |
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Gas System |
2 MKS mass flow controllers (Ar + reactive gas); mixing capability |
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Baking Temperature |
150°C (infrared heating) |
1. Dual-Target Flexibility
o Enables co-sputtering or sequential deposition for complex multilayers.
2. High Adhesion & Cleanliness
o Integrated pre-sputtering cleaning and ion-assisted deposition (anode-layer source).
3. Precision Process Control
o Programmable temperature (450°C max), rotation (5–30 RPM), and gas flow.
4. Safety & Reliability
o Interlocks for power/water failures; manual controls for critical operations.
· Research: Nanomaterials, thin-film physics, prototype development.
· Education: Advanced deposition techniques training.
· Industry: Small-batch functional coatings (e.g., optics, electronics).
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity
Contact: Lily You
Phone: +86 18650702009
Tel: +86 18650702009
Email: saleskatbattery@gmail.com
Add: No. 988 Xiahe Road, Siming District, Xiamen City
919121614
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