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Model: Lith-PC-JS09 -Multi-target, Multi-film Deposition
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Parameter |
Specification |
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Chamber Design |
Single-chamber, vertical front-loading (stainless steel/vacuum-grade materials) |
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Base Vacuum |
≤5×10−5 Pa |
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Pump-down Time |
100 min (to ≤5×10−4 Pa after N2 venting) |
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Leak Rate |
≤5×10−7 Pa·L/s |
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Magnetron Targets |
3 × 3-inch (2 standard-field, 1 high-field, DC/RF compatible, Kurt J. Lesker) |
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Power Supplies |
1 × RF (600 W, 13.56 MHz), 2 × DC (1000 W, AE Corp.) |
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Substrate Stage |
3-position, rotating (5–30 RPM), heated (up to 450°C), bias voltage (1000 V) |
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Target-Substrate Distance |
40–120 mm (80–120 mm with ion source) |
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Gas Control |
2-channel MKS mass flow controllers (Ar + reactive gases) |
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Film Thickness Uniformity |
≤5% on 2-inch area (Cu/Al: 4–5 µm, Ni/PTFE: 1–2 µm) |
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Adhesion Test |
Passes 3× tape test (glass, Si, ceramic substrates) |
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Additional Features |
Reverse sputtering, anode-layer ion source, safety interlocks, computer control |
✔
· Uniform films with ≤5% thickness variation, ideal for research and prototyping.
· Multi-layer capability (e.g., Al/Ni, Al/PTFE) with automated target switching.
✔ Advanced Process Control
· Computer-controlled deposition (temperature, rotation, gas flow).
· Ion-assisted deposition enhances film density and adhesion.
✔ Flexible & Reliable Design
· Three-target system supports diverse materials (metals, dielectrics, semiconductors).
· Substrate heating (450°C) and rotation ensure high-quality coatings.
✔ Research-Optimized Safety
· Fail-safe protections (water/power interlocks, anti-misoperation).
· Controlled environment with bake-out and contamination liners.
· Academic & Industrial R&D: Thin-film studies, optoelectronics, protective coatings.
· Semiconductor & MEMS: Precise metal/dielectric layers for device fabrication.
· Advanced Materials: Hard coatings (e.g., tooling), functional films (e.g., PTFE).
· Repeatable results with automated workflows.
· Imported critical components (Kurt J. Lesker targets, AE power supplies) ensure reliability.
· Compact footprint with full-featured capabilities for labs.
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity
Contact: Lily You
Phone: +86 18650702009
Tel: +86 18650702009
Email: saleskatbattery@gmail.com
Add: No. 988 Xiahe Road, Siming District, Xiamen City
919121614
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