HOME >> PRODUCTS >> Magnetron Sputtering Coating System
Model: Lith-PC-JS03-Rotatable Triple-targets
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Category |
Parameter |
Value/Description |
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Chamber Structure |
Design |
Vertical front-loading, stainless steel |
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Sample Access |
Easy loading/unloading |
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Vacuum Performance |
Base Pressure |
≤5×10−5 Pa |
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Leak Rate |
≤5×10−7 Pa·L/s |
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Pressure Rise Rate (12h) |
≤10 Pa |
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Pumping System |
Domestic molecular pump + mechanical pump |
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Targets & Power Supplies |
Target Quantity & Size |
3 × 2-inch magnetron targets (HV compatible) |
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Target Types |
1 × Standard magnetic field, 1 × Strong magnetic field |
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Target-Substrate Distance (Multilayer) |
40–120 mm |
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Target-Substrate Distance (Ion Source) |
80–120 mm |
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RF Power Supply |
1 × 1000 W, 13.56 MHz (auto-matching) |
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DC Power Supply |
2 × 1000 W |
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Substrate Holder |
Capacity |
Up to 3 substrates |
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Rotation Speed |
5–30 RPM (self-rotation + planetary) |
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Heating Range |
Programmable up to 450°C |
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Bias Voltage |
Supports up to 1000 V |
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Gas Control System |
Gas Lines |
2 independent MKS mass flow controllers (Ar + reactive gas) |
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Features |
Gas mixing, adjustable/measurable chamber pressure |
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Additional Features |
Chamber Baking |
Infrared heating (150°C) |
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Liner Plate |
Prevents chamber contamination |
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Safety Protections |
Water/power failure interlock, anti-misoperation protection |
· Supports for metals, semiconductors, and insulators.
· Triple-target design enables sequential multilayer deposition without vacuum breaks.
· Programmable substrate heating (±450°C) with adjustable ramp rates.
· Rotation mechanism (5–30 RPM) ensures uniform film thickness.
· Ideal for nanoscale functional films (e.g., optoelectronics, tribological coatings).
· Reverse sputtering cleaning enhances film adhesion and purity.
· Manual controls for target shutters, rotation, and temperature.
· Safety systems mitigate operational risks (e.g., interlock protections).
· Academic & Government Labs: Thin-film material R&D.
· Industrial Prototyping: Small-scale production of specialized coatings.
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity
Contact: Lily You
Phone: +86 18650702009
Tel: +86 18650702009
Email: saleskatbattery@gmail.com
Add: No. 988 Xiahe Road, Siming District, Xiamen City
919121614
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