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Nano Thin Film Evaporation Evaporator For Metals, Alloys & Dielectric Film Deposition
Designed for the deposition of conductive films, semiconductor films, ferroelectric films, and optical coatings, this system is widely utilized in university laboratories, research institutions, and small-scale production environments requiring high-precision thin-film fabrication.
· Deposition Chamber: U-shaped design with front-loading door, dimensions: 800 × 600 × 600 mm.
:
o Anode voltage: 8 kV / 10 kV (1 set included).
o Power range: 0–10 kW (adjustable).
· Crucible: Water-cooled, 6-pocket design (11 mL per pocket).
· Resistive Evaporation Source (Optional):
o Voltage: 5 V / 10 V.
o Power: 300 A current, max. 3 kW output (1 set).
o Configurable with 3 water-cooled electrodes to form 2 evaporation boats.
· Substrate Holder:
o Accommodates up to 4″ substrates.
o Rotational speed: 5–60 RPM (continuously adjustable).
o Substrate-to-source distance: 300–350 mm.
o Heating range: up to 800°C ±1°C (manual control).
o Includes a manual sample shutter assembly.
· Gas Delivery System: 1-channel mass flow controller (MFC).
· Vacuum System:
o Base pressure: ≤6.7 × 10–4 Pa.
o Pump-down time: ≤20 min (from 1 × 10–1 Pa to 5 × 10–4 Pa).
o Leak rate: ≤6.7 × 10–7 Pa·L/s.
· Thickness Monitoring: Quartz crystal microbalance (QCM) with display range: 0–99,999 Å.
1. Precision Control: Adjustable e-beam power and substrate rotation ensure uniform film thickness and composition.
2. Versatility: Compatible with multiple evaporation sources (e-beam + resistive), enabling deposition of diverse materials.
3. High-Temperature Stability: Substrate heating up to 800°C (±1°C) supports annealing and epitaxial growth.
4. Efficient Vacuum Performance: Rapid pump-down and low leak rate enhance process reproducibility.
5. User-Friendly Design: Front-loading chamber and modular components simplify maintenance and sample handling.
· Advanced Materials: Optoelectronics, MEMS, superconducting films.
· Energy Applications: Thin-film solar cells, battery electrodes.
· Academic Research: Surface science, nanotechnology, and condensed matter physics.
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME: 15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity
Contact: Lily You
Phone: +86 18650702009
Tel: +86 18650702009
Email: saleskatbattery@gmail.com
Add: No. 988 Xiahe Road, Siming District, Xiamen City
919121614
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